System for supplying halogen gas or halogen containing gas...

Fluid handling – Processes – With control of flow by a condition or characteristic of a...

Reexamination Certificate

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Details

C137S001000, C137S255000

Reexamination Certificate

active

11033117

ABSTRACT:
Since the system for supplying gas comprises a storage container, a compressor which pressurizes fluorine gas in the storage container, and a pressurized storing container which presses fit and stores the fluorine gas, by supplying fluorine gas or the like to the destination from this system for supplying gas, it is not necessary to change gas source such as a gas cylinder or the like. In this way, fluorine gas or the like can be supplied to the destination inexpensively and safely.

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