System for supply and delivery of high purity and ultrahigh...

Refrigeration – Cryogenic treatment of gas or gas mixture – Separation of gas mixture

Reexamination Certificate

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C062S928000

Reexamination Certificate

active

07076969

ABSTRACT:
A system for the supply and delivery of a high or a ultrahigh purity (UHP) carbon dioxide product stream to at least one process tool within a manufacturing facility and method comprising same is disclosed herein. In one embodiment, the system is comprised of the following sub-systems: a carbon dioxide source, a carbon dioxide delivery system, and the point of use (POU) containing at least one process tool.

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patent: 2002327895 (2002-11-01), None
patent: WO 03/033114 (2003-04-01), None
patent: WO 03/033428 (2003-04-01), None

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