Refrigeration – Cryogenic treatment of gas or gas mixture – Separation of gas mixture
Reexamination Certificate
2006-07-18
2006-07-18
Doerrler, William C. (Department: 3744)
Refrigeration
Cryogenic treatment of gas or gas mixture
Separation of gas mixture
C062S928000
Reexamination Certificate
active
07076969
ABSTRACT:
A system for the supply and delivery of a high or a ultrahigh purity (UHP) carbon dioxide product stream to at least one process tool within a manufacturing facility and method comprising same is disclosed herein. In one embodiment, the system is comprised of the following sub-systems: a carbon dioxide source, a carbon dioxide delivery system, and the point of use (POU) containing at least one process tool.
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Cirucci John Frederick
Gershtein Vladimir Yliy
Ivankovits John Christopher
Mattiola Paul Anthony
Air Products and Chemicals Inc.
Doerrler William C.
Morris-Oskanian Rosaleen P.
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