System for substrate cooling in an evacuated environment

Details System for substrate cooling in an evacuated environment System for substrate cooling in an evacuated environment

1991-09-20

1993-01-26

Davis, Jr., Albert W.

Heat exchange

With retainer for removable article

165 802, 165 805, 16510434, 165903, 16510432, 118724, F23F 2300

Patent

active

051815567

ABSTRACT:
A method and apparatus are disclosed using a combination of convection and conduction cooling to cool an article in an evacuated environment. A processing chamber is used which includes at least one heat sink. A flat surface of the article to be cooled is positioned within the chamber in a spaced apart facing parallel relationship to a facing surface of the heat sink. High conductivity gases are admitted into the chamber to accomplish cooling of the article.

REFERENCES:
patent: 4457359 (1984-07-01), Holden
patent: 4512391 (1985-04-01), Harra
patent: 4909314 (1990-03-01), Lamont, Jr.
patent: 4969511 (1990-11-01), Person
patent: 5113929 (1992-05-01), Nakagawa et al.

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