System for strictly positioning an object along an axis

Details System for strictly positioning an object along an axis System for strictly positioning an object along an axis

1988-09-08

1989-10-03

Shoop, Jr., William M.

Electricity: motive power systems

Positional servo systems

With particular 'error-detecting' means

318577, 318632, 250201, 250548, G05B 106

Patent

active

048719552

ABSTRACT:
This invention relates to a system for strictly positioning along an axis an object such as a wafer of semi-conducting material during a process of constructing integrated circuits, wherein it comprises:

REFERENCES:
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patent: 3843916 (1974-10-01), Trotel et al.
patent: 3866212 (1975-02-01), Simon et al.
patent: 4019109 (1977-04-01), McCoy et al.
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patent: 4453084 (1984-06-01), Brouwer
patent: 4494060 (1985-01-01), Chitayat et al.
patent: 4631416 (1986-12-01), Trutna, Jr.
patent: 4654571 (1987-03-01), Hinds
patent: 4687980 (1987-08-01), Philips et al.
patent: 4698575 (1987-10-01), Bouwer
Journal of Vac. Science & Technology, Vol. 19, No. 4 of Nov./Dec., 1981, pp. 1214 to 1218.
Solid State Technology, June, 1980, pp. 80 to 84, Proceedings of the Int'l Conf. on Microlithography, Sept. 30, etc. 1980, Microcircuit Engineering 80, pp. 181 to 191.

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