System for stabilization of pressure perturbations from oxidatio

Details System for stabilization of pressure perturbations from oxidatio System for stabilization of pressure perturbations from oxidatio

1996-06-07

1999-02-23

Achutamurthy, Ponnathapura

Fluid handling

Systems

Programmer or timer

1376242, 422112, 422113, 422114, 423210, F17D 300, F17D 120, G05D 700, B01J 800

Patent

active

058733884

ABSTRACT:
A pressure damping system for damping pressure perturbations incident to switching of switchable flow control means in a fluid flow circuit. The pressure surge damping system comprises a throttle valve in the circuit, with the throttle valve and switchable flow control means being constructed and arranged for selective adjustment of the throttle valve when the switchable flow control means is switched, to attenuate pressure perturbations incident to switching of the switchable flow control means. The pressure surge damping system of the invention may be employed in a multi-vessel oxidation system for the treatment of semiconductor effluent gas, or in other applications involving periodic or cyclic switched flows which generate an upstream-propagating pressure wave detrimental to an upstream process facility.

REFERENCES:
patent: 4238460 (1980-12-01), Aiken et al.
patent: 4834020 (1989-05-01), Bartholomew
patent: 4993358 (1991-02-01), Mahawili
patent: 5000221 (1991-03-01), Palmer
patent: 5011520 (1991-04-01), Carr et al.
patent: 5113789 (1992-05-01), Kamian
patent: 5118286 (1992-06-01), Sarin
patent: 5122391 (1992-06-01), Mayer
patent: 5136975 (1992-08-01), Bartholomew et al.
patent: 5199856 (1993-04-01), Epstein et al.
patent: 5211729 (1993-05-01), Sherman
patent: 5220940 (1993-06-01), Palmer
patent: 5251654 (1993-10-01), Palmer
patent: 5255709 (1993-10-01), Palmer
patent: 5255710 (1993-10-01), Palmer
patent: 5304398 (1994-04-01), Krussell et al.
patent: 5320124 (1994-06-01), Palmer
patent: 5361800 (1994-11-01), Ewing
patent: 5450873 (1995-09-01), Palmer et al.
patent: 5456280 (1995-10-01), Palmer

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