System for soft lithography

Details System for soft lithography System for soft lithography

2006-11-16

2010-06-15

Yan, Ren (Department: 2854)

Printing

Printing members

C101S327000, C101S486000

Reexamination Certificate

active

07735419

ABSTRACT:
A transfer sheet placed between a vacuum chuck and a stamp in a soft lithography aligner facilitates three dimensional manufacturing with elastomeric materials.

REFERENCES:
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patent: 5937758 (1999-08-01), Maracas et al.
patent: 6656308 (2003-12-01), Hougham et al.
patent: 7117790 (2006-10-01), Kendale et al.
patent: 2004/0011231 (2004-01-01), Hall et al.
patent: 2004/0058067 (2004-03-01), Law et al.
patent: 2004/0107704 (2004-06-01), Hudson et al.
patent: 2006/0130692 (2006-06-01), Peterman et al.

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