Measuring and testing – Surface and cutting edge testing – Roughness
Reexamination Certificate
2005-08-23
2005-08-23
Larkin, Daniel S. (Department: 2856)
Measuring and testing
Surface and cutting edge testing
Roughness
Reexamination Certificate
active
06931917
ABSTRACT:
A profiler or scanning probe microscope may be scanned across a sample surface with a distance between them controlled to allow the sensing tip to contact the surface intermittently in order to find and measure features of interest. The distance is controlled so that when the sensing tip is raised or lowered to touch the sample surface, there is no lateral relative motion between the tip and the sample. This prevents tip damage. Prior knowledge of the height distribution of the sample surface may be provided or measured and used for positioning the sensing tip initially or in controlling the separation to avoid lateral contact between the tip and the sample. The process may also be performed in two parts: a fast find mode to find the features and a subsequent measurement mode to measure the features. A quick step mode may also be performed by choosing steps of lateral relative motion to be smaller than 100 nanometers to reduce probability of tip damage. In this mode, after each vertical step to increase the separation between the tip and the sample, it is detected as to whether the tip and the sample are in contact. If they are still in contact after the vertical step, one or more vertical steps are taken to increase the separation, and no vertical step to reduce the separation is taken and no lateral relative motion is caused until it is determined that the tip and the sample are no longer in contact.
REFERENCES:
patent: 2691887 (1954-10-01), Rinker
patent: 2728222 (1955-12-01), Becker et al.
patent: 3283568 (1966-11-01), Reason
patent: 4103542 (1978-08-01), Wheeler et al.
patent: 4391044 (1983-07-01), Wheeler
patent: 4441177 (1984-04-01), Groh et al.
patent: 4574625 (1986-03-01), Olasz et al.
patent: 4641773 (1987-02-01), Morino et al.
patent: 4669300 (1987-06-01), Hall et al.
patent: 4724318 (1988-02-01), Binnig
patent: 4883959 (1989-11-01), Hosoki et al.
patent: 4902892 (1990-02-01), Okayama et al.
patent: RE33387 (1990-10-01), Binnig
patent: 5146690 (1992-09-01), Breitmeier
patent: 5162653 (1992-11-01), Hosaka et al.
patent: RE34331 (1993-08-01), Elings et al.
patent: 5253106 (1993-10-01), Hazard
patent: 5266801 (1993-11-01), Elings et al.
patent: 5307693 (1994-05-01), Griffith et al.
patent: 5308974 (1994-05-01), Elings et al.
patent: 5309755 (1994-05-01), Wheeler
patent: 5347854 (1994-09-01), Martin et al.
patent: 5406832 (1995-04-01), Gamble et al.
patent: 5412980 (1995-05-01), Elings et al.
patent: 5414690 (1995-05-01), Shido et al.
patent: 5415027 (1995-05-01), Elings et al.
patent: 5426302 (1995-06-01), Marchman et al.
patent: 5481521 (1996-01-01), Washizawa et al.
patent: 5488862 (1996-02-01), Neukermans et al.
patent: 5497656 (1996-03-01), Kado et al.
patent: 5509300 (1996-04-01), Chamberlin et al.
patent: 5513168 (1996-04-01), Fujihara et al.
patent: 5614712 (1997-03-01), Ray
patent: 5627365 (1997-05-01), Chiba et al.
patent: 5629790 (1997-05-01), Neukermans et al.
patent: 5705741 (1998-01-01), Eaton et al.
patent: 5866806 (1999-02-01), Samsavar et al.
patent: 6028305 (2000-02-01), Minne et al.
patent: 0361932 (1989-09-01), None
patent: 0536827 (1992-09-01), None
patent: 0594362 (1993-10-01), None
patent: 0633450 (1994-06-01), None
patent: 2009409 (1979-06-01), None
patent: 2249910 (1990-10-01), None
patent: WO 88/04047 (1988-06-01), None
patent: WO 94/08204 (1994-04-01), None
patent: WO 94/25888 (1994-11-01), None
patent: 05920 (1998-02-01), None
Griffith, J.E. et al., “Dimensional Metrology with Scanning Probe Microscopes” J. Appl. Phys. vol. 74, No. 9, Nov. 1, 1993, pp. R83-R109.
“A New Force Sensor Incorporating Force-Feedback Control for Interfacial Force Microscopy”, S. Joyce et al., Rev. Sci. Instrum., vol. 62, No. 03, Mar. 1991, pp. 710-715.
“From Molecules to Cells: Imaging Soft Samples with the Atomic Force Microscope”, M. Radmacher et al., Science, vol. 257, Sep. 25, 1992, pp. 1900-1905.
“Dimensional Metrology of Phase-Shifting Masks with Scanning Probe Microscopes,” J.E. Griffith et al., SPIE, vol. 2087, Photomask Technology and Management, 1993, pp. 107-118.
“Silicon Wafer Thermal Processing: 300 mm Issues,” H. Huff et al., Future Fab International, 1996, pp. 35-49.
“Atomic force microscopy for high speed imaging using cantilevers with an integrated actuator and sensor,” S.R. Manalis et al., Appl. Phys. Lett., 68(6), Feb. 5, 1996, pp. 871-873.
“Single-Tube Three-Dimensional Scanner for Scanning Tunneling Microscopy,” G. Binnig et al., Review of Scientific Instruments, vol. 57, No. 8, Aug. 1986, pp. 1688-1689.
“Magnetic Force Microscopy (MFM),” P. Grutter et al., Springer Series in Surface Sciences, Scanning Tunneling Microscopy II, vol. 28, Springer-Verlag Berlin Heidelberg 1992, pp. 152-207.
“A Stand-Alone Scanning Force and Friction Microscope,” M. Hipp et al., Ultramicroscopy, 42-44(1992), Elsevier Science Publishers B.V., pp. 1498-1503.
“New Scanning Device for Scanning Tunneling Microscope Applications,” R. Koops et al., Review of Scientific Instruments,vol. 63, No. 8, Aug. 1992, pp. 4008-4009.
“Scanning Tunneling Microscopy,” G. Binnig et al., Helvetica Physica Acts, vol. 55, 1982, pp. 726-735.
“Two-Scanning Tunneling Microscope Devices for Large Samples,” G.B. Picotto et al., Review of Scientific Instruments, vol. 64, No. 9, Sep. 1993, pp. 2699-2701.
“A High Precision Micropositioner Based on Magnetostriction Principle,” W. Wang et al., Review of Scientific Instruments, vol. 63, No. 1, Jan. 1992, pp. 249-254.
“Design and Assessment of Monolithic High Precision Translation Mechanisms,” S.T. Smith et al., Journal of Physics E: Scientific Instruments, vol. 20, Aug. 1987, pp. 977-983.
“Novel Optical Approach to Atomic Force Microscopy,” G. Meyer et al., Applied Physics Letters, vol. 53, No. 12, Sep. 1988, pp. 1045-1047.
“Long Range Constant Force Profiling for Measurement of Engineering Surfaces,” L.P. Howard, Review of Scientific Instruments, vol. 63, No. 10, Oct. 1992, pp. 4289-4295.
“The National Institute of Standards and Technology Molecular Measuring Machine Project: Metrology and Precision Engineering Design,” E.C. Teague, J. Vac. Sci. Technol. B, vol. 7, No. 6, Nov./Dec. 1989, pp. 1898-1902.
“Evaluating the Sensitivity of a Fiber-Optic Displacement Sensor,” W.C. Oliver, Nano Instruments, Inc., Technotes, no date available.
“To Measure a Molecule,” F. Flam, pp. 21-24, no date available.
“The National Institute of Standards and Technology Molecular Measuring Machine: A Long-Range Scanning Tuneling Microscope for Dimensional Metrology,” E.C. Teague, Microbeam Analysis, 1989, pp. 545-547.
“Products for Micropositioning,” Product Information Brochure published by Physik Instrumente (PI) GmbH & Co., no date available.
“Fiber Optic Proximity Sensors,” Product Information Brochure published by Phone-Or, Ltd., Fiber Optic Sensors of Ashkelon ISRAEL, no date available.
“Series 88 Fiber-Optic Displaceent Sensors,” G. J.Philps, Sensors, Feb. 1995.
“Nanometrology,” E.C. Teague; Proceedings of Scanned Probe Microscopy; STM and Beyond, an Engineering Foundation Conference, Santa Barbara, CA Jan. 1991.
“Microlever with combined integrated sensor/actuator functions for scanning force microscopy,” J. Brugger et al., Sensors and Actuators A, 43, 1994, pp. 339-345.
“Rocking-beam force-balance approach to atomic force microscopy,” D.A. Grigg et al., Ultramicroscopy, 42-44, 1992, pp. 1504-1508.
“Scanning force microscope springs optimized for optical-beam deflections and with tips made by controlled fracture,” M.G.L. Gustafsson et al., J. Appl. Phys., 76(1), Jul. 1, 1994, pp. 172-181.
“Thermal Imaging of Electronic Materials and Devices Using the Atomic Force Microscope,” A. Majumdar et al., Proceedings of the SPIE—The International Society for Optical Engineering
Eaton Steven G.
McWaid Thomas
Panagas Peter
Samsavar Amin
Wheeler William R.
KLA-Tencor Corporation
Larkin Daniel S.
Parsons Hsue & de Runtz LLP
LandOfFree
System for sensing a sample does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with System for sensing a sample, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and System for sensing a sample will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3446277