System for reviewing defects, a computer implemented method...

Details System for reviewing defects, a computer implemented method... System for reviewing defects, a computer implemented method...

2008-07-15

2008-07-15

Barbee, Manuel L (Department: 2857)

Data processing: measuring, calibrating, or testing

Measurement system

Performance or efficiency evaluation

C702S082000, C702S084000, C700S109000, C700S110000

Reexamination Certificate

active

11367360

ABSTRACT:
A system for reviewing defects includes an analysis module configured to analyze defect information of a plurality of intermediate products, the defect information including information of an amount of defects classified by sizes of the defects existing in each of the intermediate products; a failure magnitude calculation module configured to calculate a systematic failure magnitude of the intermediate products caused by fabrication procedure of the intermediate products; a classification module configured to classify a calculated result of the systematic failure magnitude; and a review target selection module configured to select intermediate products becoming review targets.

REFERENCES:
patent: 5598341 (1997-01-01), Ling et al.
patent: 6483938 (2002-11-01), Hennessey et al.
patent: 6556955 (2003-04-01), Yoshitake et al.
patent: 6775817 (2004-08-01), Ono et al.
patent: 2004/0223639 (2004-11-01), Sato

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