System for regulating molecular flux and its application to co-e

Details System for regulating molecular flux and its application to co-e System for regulating molecular flux and its application to co-e

1977-11-02

1979-07-03

Dixon, Harold A.

Radiant energy

Ion generation

Field ionization type

148175, 250492A, H01J 2700

Patent

active

041601661

ABSTRACT:
A system for automatic regulation of the density of a given molecular type at a pre-arranged point in an apparatus called a "flux or molecular jet", intended to make epitaxy layers. In a vacuum enclosure a probe for mass spectrometry analysis (electrostatic, four pole apparatus) picks up the types projected by evaporating units, ionizes them, filters and detects them as a function of their respective masses. The heating in each unit is regulated by a servo-control loop which contains means for analyzing the type concerned.

REFERENCES:
"Fabrication for Multilayer Semiconductor Devices" by Chang et al., IBM Tech. Discl. Bull., vol. 15, No. 2, 7-72, pp. 365-366.

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