Optics: measuring and testing – Range or remote distance finding – With photodetection
Patent
1983-06-17
1986-02-04
Henry, Jon W.
Optics: measuring and testing
Range or remote distance finding
With photodetection
350502, 350576, 350174, 356252, G02B 2100, G02B 2734, G02B 2736
Patent
active
045681520
ABSTRACT:
A marking image control system for a microscope arrangement in which the image of a marking on a mask is reflected into the optical path and combined with an object image of the microscope, the system forming an intermediate image of the marking in order to facilitate shifting of the image of the marking in a film plane or a viewing plane of the microscope.
REFERENCES:
patent: 4057318 (1977-11-01), Schindl
patent: 4281923 (1981-08-01), Friedman
patent: 4302087 (1981-11-01), Reinheimer et al.
patent: 4303340 (1981-12-01), Hoffman
patent: 4473293 (1984-09-01), Phillips
Merstallinger Kurt
Schindl Klaus
C. Reichert Optische Werke AG
Henry Jon W.
Nath Gary M.
Raines Stephen
Spencer Alan H.
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