System for providing in-situ temperature monitoring and temperat

Details System for providing in-situ temperature monitoring and temperat System for providing in-situ temperature monitoring and temperat

1996-07-01

1998-10-13

Paschall, Mark H.

Electric heating

Heating devices

With power supply and voltage or current regulation or...

21912143, 21912141, 356316, 356244, B23K 1000, H05B 102

Patent

active

058215026

ABSTRACT:
A housing provides temperature monitoring and temperature control of a specimen, while the specimen is being exposed to plasma environments for in-situ reactivity studies or other plasma processing purposes. The housing is adaptable for use with a temperature controller and a pressure measurement device. The housing includes a temperature monitoring mechanism and temperature control connections. The temperature monitoring mechanism provides in-situ specimen temperature indications. It includes a first enclosure having a specimen supporting portion on an exterior surface thereof. A fluid conduit has a first end in fluid communication with an interior portion of the first closure. A second enclosure has an interior portion thereof in fluid communication with a second end of the fluid conduit. The second enclosure includes the ability for attachment to a pressure measurement device. Temperature indications of a test specimen positioned on the specimen supporting portion are correlated with pressures in the first and second enclosures. The correlations provide commensurate indications of pressure to the pressure measurement device to provide the in-situ specimen temperature indications. The temperature control connections allow use with a temperature controller for providing a desired temperature of the specimen supporting portion.

REFERENCES:
patent: 3871768 (1975-03-01), Belcher et al.
patent: 4482246 (1984-11-01), Meyer et al.
patent: 4493745 (1985-01-01), Chen et al.
patent: 4925306 (1990-05-01), Sacks et al.
patent: 4951602 (1990-08-01), Kanai
patent: 5081397 (1992-01-01), Liang et al.
patent: 5122713 (1992-06-01), Liang et al.
patent: 5235401 (1993-08-01), Cilia et al.
patent: 5347460 (1994-09-01), Gifford et al.
patent: 5408494 (1995-04-01), Schlienger
patent: 5413954 (1995-05-01), Aydil et al.
patent: 5446538 (1995-08-01), Noll
patent: 5489362 (1996-02-01), Steinhardt et al.
patent: 5671045 (1997-09-01), Woskov et al.

Affiliated with

Also associated with

Rating

System for providing in-situ temperature monitoring and temperat does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with System for providing in-situ temperature monitoring and temperat, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and System for providing in-situ temperature monitoring and temperat will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-314892