Liquid purification or separation – Structural installation – Closed circulating system
Reexamination Certificate
2006-03-28
2006-03-28
Prince, Fred G. (Department: 1724)
Liquid purification or separation
Structural installation
Closed circulating system
C210S202000, C210S206000, C210S259000, C210S266000, C210S748080, C210S900000
Reexamination Certificate
active
07018529
ABSTRACT:
The ultrapure water producing system produces ultrapure water with high purity and remarkably low content of metals even just after restart of operation thereof. Water sent through the pump3or4into a line8flows through a heat exchanger10, a line12, a UV oxidation apparatus20, a line22, an ion exchange device30, a line32and a membrane filtering device40and is treated in each device in this order to be ultrapure water. The devices10, 20, 30, 40have bypass lines11, 21, 31, 41, respectively. In the sterilizing process, bactericide water is fed only to the membrane filtering device40via the bypass lines11, 21and31. In the following sterilizing process of the heat exchanger10and the UV oxidation apparatus20, the bactericide water flows the line41bypassing around the membrane filtering device40.
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Furukawa Yukihiro
Okumura Masatake
Kanesaka Manabu
Kurita Water Industries Ltd.
Prince Fred G.
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