Radiant energy – Irradiation of objects or material – Ion or electron beam irradiation
Reexamination Certificate
2011-08-30
2011-08-30
Vanore, David A (Department: 2881)
Radiant energy
Irradiation of objects or material
Ion or electron beam irradiation
C250S306000, C250S310000, C250S397000, C250S398000, C250S493100
Reexamination Certificate
active
08008639
ABSTRACT:
A processing system comprises a gas supply apparatus with which process gas is supplied to an object. An activation beam activates the gas thereby inducing a chemical reaction between material at the surface of the object and the process gas causing ablation of material from the surface or deposition of material at the surface. The gas supply apparatus is formed from a stack of plates providing a gas conduit system between at least one gas inlet and at least one gas outlet.
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Bertagnolli Emmerich
Buhler Wolfram
Rosenthal Alexander
Stebler Camille
Wanzenbock Heinz
Carl Zeiss NTS GmbH
Potomac Patent Group PLLC
Vanore David A
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