Metal working – Barrier layer or semiconductor device making
Patent
1997-08-22
1999-11-09
Graybill, David E.
Metal working
Barrier layer or semiconductor device making
36446802, 36446807, 36446823, 36446828, 36447805, 36447807, 36447814, G06F 1546
Patent
active
059805919
ABSTRACT:
A processing system comprising a loading/unloading section, a processing section and an interface section. The system further comprises a convey mechanism and at least two waiting sections. The convey mechanism can move in either direction between between the loading/unloading section and the interface section, for conveying objects to the processing units included in the processing section and conveying objects in either direction between the loading/unloading section and the interface section. The waiting sections are provided for temporarily holding an object before the convey mechanism conveys an object to the interface section.
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Akimoto Masami
Nagano Toshihiko
Ogawa Shizuo
Graybill David E.
Tokyo Electron Limited
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