System for positioning an object in an optical projection system

Details System for positioning an object in an optical projection system System for positioning an object in an optical projection system

1978-04-17

1979-10-16

Corbin, John K.

Optics: measuring and testing

By alignment in lateral direction

With registration indicia

356150, 356400, G01B 1100, H01L 2168

Patent

active

041711629

ABSTRACT:
The invention relates to the positioning of an object comprising at least two fixed reference marks in an optical projection system. The system according to the invention comprises two projector arms illuminating two regions of the surface of the object through two marks, which form a reference system, having a variable inter-axis interval, display means enabling coincidence between the reference marks of the object and the reference system to be established.

REFERENCES:
patent: 4052603 (1977-10-01), Karlson
patent: 4054386 (1977-10-01), Suzuki
Khoury et al., "Alignment System for Projection Mask," IBM Technical Disclosure Bulletin, vol. 13, No. 3, Aug. 1970, pp. 768-769.
Harper et al., "Aligning and Inspecting Microelectronic Circuits," IBM Technical Disclosure Bulletin, vol. 13, No. 4, Sep. 1970, pp. 1028-1029.

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