System for optimizing process parameters in photoactive semicond

Details System for optimizing process parameters in photoactive semicond System for optimizing process parameters in photoactive semicond

1985-01-25

1987-10-13

Smith, Jerry

Boots, shoes, and leggings

156627, 427 74, H01L 2166, H01L 3118, C30B 2516

Patent

active

047003111

ABSTRACT:
Materials and systems substantially having photoactive properties are produced with a high quality output and without time losses in the fabrication process. To determine the quality of the photoactive material in situ, conductivity is induced in the material by exciting charge carriers through irradiation, and an electromagnetic field influenced thereby is measured, with the result of the measurement being evaluated by a computer with a corresponding control of actuating members such as valves and controllers. Optimum process parameters are thus found and used for the process.

REFERENCES:
patent: 3982049 (1976-09-01), Mee et al.
patent: 4332833 (1982-06-01), Aspnes et al.
patent: 4525375 (1985-06-01), Hanak
Riber R.H.E.E.D. System, Riber S.A., Ruel-Malmaison, France, Oct. 1975.
Kunst, M. et al., "Time-Resolved Microwave Conductivity (TRMC): Photoeffects at Semiconductor/Electrolyte Interfaces", Journal of the Electrochemical Society, vol. 131, No. 4, Apr. 1984, 954-956.

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