Measuring and testing – Surface and cutting edge testing – Roughness
Reexamination Certificate
2006-06-30
2009-10-27
Larkin, Daniel S (Department: 2856)
Measuring and testing
Surface and cutting edge testing
Roughness
Reexamination Certificate
active
07607343
ABSTRACT:
In accordance with the invention, an estimator is used in the controller portion of a scanning probe microscope to provide precise position estimates of the probe tip which is controlled in the vertical direction by a microelectromechanical system (MEMS) actuator. The precise position estimates typically enhance the ability of the scanning probe microscope to follow the surface and typically provide improved measurements of the surface topography.
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Agilent Technologie,s Inc.
Larkin Daniel S
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