System for monitoring substrate conditions

Details System for monitoring substrate conditions System for monitoring substrate conditions

2005-09-27

2005-09-27

Lee, Andrew H. (Department: 2877)

Optics: measuring and testing

By light interference

For dimensional measurement

C356S496000, C356S482000

Reexamination Certificate

active

06950193

ABSTRACT:
A system for determining at least one condition of a substrate includes an optical waveguide for transmitting light from a light source. The optical waveguide can be embedded in the substrate and operatively coupled to an interferometric system. The interferometric system is operatively coupled to a processor. The interferometric system provides the processor with information relating to transmissions through the wave guide, which are indicative of substrate conditions and/or operations being performed relative to the substrate.

REFERENCES:
patent: 5419636 (1995-05-01), Weiss
patent: 6191864 (2001-02-01), Sandhu
patent: 0 232 209 (1987-08-01), None
patent: 0 881 040 (1998-12-01), None
patent: 0 920 092 (1999-06-01), None
International Search Report, EP 03 01 9152, Nov. 17, 2003.

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