System for monitoring foreign particles, process processing...

Details System for monitoring foreign particles, process processing... System for monitoring foreign particles, process processing...

2009-03-02

2011-10-25

Punnoose, Roy M (Department: 2886)

Optics: measuring and testing

Inspection of flaws or impurities

Surface condition

Reexamination Certificate

active

08045148

ABSTRACT:
A system for monitoring foreign matter includes a manufacturing line having plural process processing apparatuses, a production management system which manages the processing of workpieces in the manufacturing line, plural optical heads which monitor foreign matter in relation to at least one of the workpieces, and which provide an output signal indicative thereof, and at least one image signal processing unit provided in a lesser number than a number of the plural optical heads for processing the output signal therefrom.

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