System for monitoring foreign particles, process processing...

Details System for monitoring foreign particles, process processing... System for monitoring foreign particles, process processing...

2007-03-27

2007-03-27

Pham, Hoa Q. (Department: 2877)

Optics: measuring and testing

Inspection of flaws or impurities

Surface condition

C356S237300

Reexamination Certificate

active

10630734

ABSTRACT:
A foreign matter monitoring system comprises: a production management system which manages the processing of workpieces in a manufacture line; foreign matter monitors mounted as on-machine equipment in plural process processing apparatuses of the manufacture line, said foreign matter monitors each having an optical head containing a detecting optical system for irradiating a workpiece with light and a detecting optical system for receiving reflected and scattered light from the workpiece and converting the received light to a detection image signal and an A/D converter for converting the detection image signal, which is obtained through conversion by the detecting optical system, to a detection digital image signal; and a base system having a control unit for acquiring control information, a buffer memory for storing said detection digital image signal which is acquired from each foreign matter monitor, a database storing inspection recipes each associated with a foreign matter monitor and an image signal processing unit used for, based on a detection digital image signal associated with a foreign matter monitor and acquired from the buffer memory, judging whether foreign matter and other defects are present on a workpiece according to an inspection recipe which is selected for the corresponding foreign matter monitor based on control information from the control unit.

REFERENCES:
patent: 5858863 (1999-01-01), Yokoyama et al.
patent: 5973785 (1999-10-01), Okamoto
patent: 6650409 (2003-11-01), Noguchi et al.
patent: 6894773 (2005-05-01), Morioka et al.

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