System for measuring film thickness

Details System for measuring film thickness System for measuring film thickness

1989-03-16

1990-09-11

Hannaher, Constantine

Radiant energy

Luminophor irradiation

With ultraviolet source

250301, G01N 2164

Patent

active

049565583

ABSTRACT:
A system for determining the thicknesses of thin films of materials exhibiting fluorescence in response to exposure to excitation energy from a suitable source of such energy. A section of film is illuminated with a fixed level of excitation energy from a source such as an argon ion laser emitting blue-green light. The amount of fluorescent light produced by the film over a limited area within the section so illuminated is then measured using a detector such as a photomultiplier tube. Since the amount of fluorescent light produced is a function of the thicknesses of thin films, the thickness of a specific film can be determined by comparing the intensity of fluorescent light produced by this film with the intensity of light produced by similar films of known thicknesses in response to the same amount of excitation energy. The preferred embodiment of the invention uses fiber optic probes in measuring the thicknesses of oil films on the operational components of machinery which are ordinarily obscured from view.

REFERENCES:
patent: 4799756 (1989-01-01), Hirschfeld
A. E. Smart and R. A. J. Ford; "Measurement of Thin Liquid Films by a Fluorescence Technique," Wear, Vol. 29, No. 1 (Jul. 1974); pp. 41-47 [Copyright.COPYRGT. 1974 Elsevier Sequoia S. A., Lausanne]

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