System for measuring electrical resistance and temperature durin

Details System for measuring electrical resistance and temperature durin System for measuring electrical resistance and temperature durin

1982-05-25

1985-09-24

Groody, James J.

Communications: electrical

Continuously variable indicating

Condition responsive

34087019, 34087022, 374185, 427 8, 204192R, G08C 1916, C23C 1302, C23C 1500

Patent

active

045435766

ABSTRACT:
A system for measuring electrical resistance and temperature during the manufacture of thin, conductive films deposited on substrates by means of evaporation or sputter-deposition. A deposition unit with an evacuatable load lock chamber and a rotating substrate holder are employed as the deposition system. The specific electrical resistance of the film is measured according to the principle of the two-point or four-point measuring methods at a reference substrate with specific sample geometry and with low-resistance contacts. The substrate temperature is measured by means of resistance thermometers. With the invention, the transmission of the measured data occurs contact-free by means of electro-magnetic radiation, preferably by means of a telemetric pulse code modulation method.

REFERENCES:
patent: 3039355 (1962-06-01), Suter
patent: 3609728 (1971-09-01), Quinn
patent: 4331702 (1982-05-01), Hieber
patent: 4332081 (1982-06-01), Francis
patent: 4422066 (1983-12-01), Belcourt

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