Optics: measuring and testing – By polarized light examination – With light attenuation
Patent
1984-04-12
1987-03-17
Evans, F. L.
Optics: measuring and testing
By polarized light examination
With light attenuation
356237, 356381, 358106, G01B 1124
Patent
active
046503331
ABSTRACT:
A non-contact system for detecting printed circuit wiring defects and for measuring circuit feature height relative to a substrate. The system has an energy source for illuminating the substrate and circuit features and a scanner for both instantaneously receiving energy reflected from the substrate and circuit features and for generating a signal in response to the reflected energy, which signal is adapted to vary with the intensity of the reflected energy. An analyzer is connected to the scanner for correlating the generated signal to a measurement representative of the height of the circuit features relative to the substrate. Variations and non-uniformity of the substrate surface due to bending, warpage or other causes can be accounted for so as to provide an accurate measurement of the height of a circuit feature relative to the substrate surface on which it is mounted.
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Crabb Robert M.
DeFoster Steven M.
Rittenhouse Norman E.
West Mark A.
Ziegler Richard A.
Evans F. L.
Harringa Joel L.
International Business Machines - Corporation
Levy Mark
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