System for measurement of the height, angle and their...

Details System for measurement of the height, angle and their... System for measurement of the height, angle and their...

2007-07-24

2007-07-24

Pyo, Kevin (Department: 2878)

Radiant energy

Photocells; circuits and apparatus

Photocell controls its own optical systems

C250S221000, C369S112230, C369S044230

Reexamination Certificate

active

11443027

ABSTRACT:
A system for measurement of the height, angle and their variations of the surface of an object comprises a measurement module and an astigmatic optical path mechanism. The optical path mechanism makes a laser beam pass a lens assembly and focus on an object. The reflected light passes the lens assembly and an astigmatic lens, arriving at the photo sensor assembly, forming a light spot thereon. The translational displacements of the object are measured by the variations in shape of the light spot on the photo sensors. The angular displacements of the object are measured accordingly by the movement of the light spot on the photo sensors.

REFERENCES:
patent: 7130258 (2006-10-01), Hendriks et al.

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