System for managing production of semiconductor devices

Details System for managing production of semiconductor devices System for managing production of semiconductor devices

1988-04-01

1990-02-13

Ruggiero, Joseph

Boots, shoes, and leggings

364149, 364578, G06F 1546, G05B 1304

Patent

active

049012428

ABSTRACT:
A system for managing successive processes which are to be performed on a semiconductor wafer in a production line for producing a semiconductor device. The system comprises a process managing block for receiving data on preceding processes which have already been performed on the semiconductor wafer on the production line and delivers conditions for the processes which are to be subsequently performed on the production line, a data accumulation block for statistically accumulating data concerning preceding processes carried out on the production line, and a simulation block for determining optimum conditions for the processes which are to be subsequently performed based on the data concerning the preceding processes which have been actually performed on the production line and the statistical data accumulated on the data accumulation block. The simulation block provides optimum process conditions to the process managing block. Any deviation of the characteristics of the unfinished product caused by preceding processes are compensated for by appropriately varying the conditions of the subsequent processes whereby semiconductor products of high quality are produced with a high yield.

REFERENCES:
patent: 3751647 (1973-08-01), Maeder et al.
patent: 4038531 (1977-07-01), Loe, Jr.
patent: 4571685 (1986-02-01), Kamoshida
patent: 4719586 (1988-01-01), Moyer et al.
patent: 4796194 (1989-01-01), Atherton
"Automated Semiconductor Wafer Processing", Microelectronics Manufacturing and Testing, Apr. 1983, pp. 46-47.

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