System for maintaining a controlled atmosphere in an electronic

Details System for maintaining a controlled atmosphere in an electronic System for maintaining a controlled atmosphere in an electronic

1994-06-09

1997-02-18

Bhat, Nina

Chemical apparatus and process disinfecting, deodorizing, preser

Process disinfecting, preserving, deodorizing, or sterilizing

Process control in response to analysis

422 10, 422 40, 422111, 422112, 422123, 437 7, 437 10, G05B 1300, G05B 1500, G05D 1600, A62B 708

Patent

active

056038925

ABSTRACT:
A system for maintaining electronic components, such as integrated circuit chips, in a contaminant-free controlled atmosphere is disclosed. The components, which may be mounted on a multichip module, are housed in a sealed enclosure and a positive pressure of contaminant-free gas, such as pure nitrogen, is maintained within the enclosure. A source of pressurized gas, controllably connected to the enclosure is provided and, preferably, an exhaust valve is used to equalize the pressure in the enclosure when it is necessary to access the interior for purposes of maintenance or repair. Preferably, there is a control system which monitors and maintains the proper level of pressure within the enclosure and which may be used to periodically flush the enclosure. Also preferably, one or more canisters of getter material are attached to the enclosure for removing contaminants.

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