Photocopying – Projection printing and copying cameras – Illumination systems or details
Reexamination Certificate
2006-04-11
2006-04-11
Fuller, Rodney (Department: 2851)
Photocopying
Projection printing and copying cameras
Illumination systems or details
C355S071000
Reexamination Certificate
active
07027129
ABSTRACT:
An system and method that expand emitted light from a laser beam without changing spatial coherence or producing speckle. The system includes a laser source and an optical projection system having a multiplexing device. The multiplexing device expands light emitted by laser source into plural beams having light intensity about equal to each other without changing spatial coherence. The multiplexing device has a plurality of spatially separated beam splitters positioned parallel to and on a same side of a mirror. The system further includes an illuminating optical system that focuses each of the plural beams and a projection optical system that projects an image of a mask illuminated with light output from illuminating optical system onto a substrate.
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Drazkiewicz Stanley W.
Kremer Alexander
ASML Holding N.V.
Fuller Rodney
Sterne, Kessler, Goldstein & Fox P.L.L.C
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