System for inspecting a surface employing configurable multi...

Details System for inspecting a surface employing configurable multi... System for inspecting a surface employing configurable multi...

2005-05-05

2008-01-01

Lauchman, Layla G. (Department: 2877)

Optics: measuring and testing

Inspection of flaws or impurities

Surface condition

C356S237300, C356S237400, C356S237500

Reexamination Certificate

active

07315364

ABSTRACT:
Apparatus for inspection of a surface, the apparatus including an objective having central and peripheral regions, which is positioned to focus an input beam through the central region in a normal direction onto the surface. The apparatus further includes a first periscope which is positionable to divert the input beam so as to pass through the peripheral region of the objective, whereby the objective focuses the input beam in an oblique direction onto the surface. There is also a second periscope which is positionable to capture radiation reflected from the surface in the oblique direction after passage of the reflected radiation through the peripheral region of the objective.

REFERENCES:
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patent: 6797975 (2004-09-01), Nishiyama et al.
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patent: 2004/0150820 (2004-08-01), Nikoonahad et al.
patent: 2004/0263834 (2004-12-01), Alumot et al.
Baer, Adam et al., Tilted Illumination Mode, U.S. Appl. No. 60/622,208 filed Oct. 25, 2004 5pp.

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