System for inspecting a disk-shaped object

Details System for inspecting a disk-shaped object System for inspecting a disk-shaped object

2005-12-22

2008-09-16

Toatley, Jr., Gregory J (Department: 2877)

Optics: measuring and testing

Inspection of flaws or impurities

Surface condition

C356S237400

Reexamination Certificate

active

07426024

ABSTRACT:
A system for inspecting a disc-shaped substrate5is disclosed. The system100is surrounded by a housing. A table2that is movable in at least an X-direction and a Y-direction and is borne by a mounting plate22is provided within the housing50. The mounting plate22is vibration isolated in comparison to the housing50. Equally, an exhaust unit40is provided beneath the mounting plate22and arranged at a distance from it. The exhaust unit40possesses an opening36for air entry. The opening36for air entry is provided in the exhaust unit between an end of the mounting plate22and a wall of the housing50.

REFERENCES:
patent: 5814116 (1998-09-01), Schneider et al.
patent: 7138629 (2006-11-01), Noji et al.
patent: 7265823 (2007-09-01), Kreh et al.
patent: 2002/0009658 (2002-01-01), Sato et al.
patent: 43 10 149 (1993-03-01), None
patent: 195 38 040 (1996-10-01), None
patent: 103 51 848.7 (2005-09-01), None
patent: 0 335 752 (1989-10-01), None

Affiliated with

Also associated with

Rating

System for inspecting a disk-shaped object does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with System for inspecting a disk-shaped object, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and System for inspecting a disk-shaped object will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3980963