System for implementing intelligent and accurate updates to...

Details System for implementing intelligent and accurate updates to... System for implementing intelligent and accurate updates to...

2006-12-19

2008-09-09

DeCady, Albert (Department: 2121)

Data processing: generic control systems or specific application

Generic control system, apparatus or process

Optimization or adaptive control

Reexamination Certificate

active

07424331

ABSTRACT:
In one embodiment, an apparatus and method for implementing intelligent and accurate updates to state-based advanced process control (APC) models are disclosed. In one embodiment, the method comprises receiving at least one of a re-measurement or a data invalidation at a state-based advanced process control (APC) model, referencing a state value table and a state update table to determine the current state of lot measurements in the state-based APC model, updating the state value table and the state update table to reflect the at least one of the re-measurement or the data invalidation, and determining settings to apply to a lot at a process tool based on process variability patterns established by the state-based APC model from the updated values in the state value table and the state update table.

REFERENCES:
patent: 6470230 (2002-10-01), Toprac et al.
patent: 7200459 (2007-04-01), Bode et al.
patent: 2005/0010319 (2005-01-01), Patel et al.
patent: 2006/0079983 (2006-04-01), Willis
patent: 2006/0271225 (2006-11-01), Schulze et al.
patent: 2007/0078556 (2007-04-01), Stirton et al.
Edgar et a.; “Model-Based Control in Microelectronis Manufacturing”; 1999 IEEE pp. 4185-4191.
Qin et al.; “Semiconductro Manufacturing Process Control and Monitoring: A Fab-Wide Framework”; 2005 Elsevier pp. 179-191.
Smith et al; “Run by Run Advanced Process Control of Metal Sputter Deposition”; 1998 IEEE;vol. 11 No. 2 pp. 276-284.

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