System for identification of defects on circuits or other...

Details System for identification of defects on circuits or other... System for identification of defects on circuits or other...

2003-06-10

2008-03-18

West, Jeffrey (Department: 2857)

Data processing: measuring, calibrating, or testing

Measurement system

Statistical measurement

C702S081000, C702S179000, C702S185000

Reexamination Certificate

active

07346470

ABSTRACT:
A system and method is disclosed for assessing a probability of failure of operation of a semiconductor wafer. The method includes inputting risk factor data into a memory and inputting a plurality of wafers into a semiconductor fabrication manufacturing process. A subset of wafers is selected to obtain a sample population and at least one region of each wafer of the sample population is inspected. Circuit design data associated with each wafer of the sample population is obtained and one or more defects that present an increased risk to the operation of a particular wafer are identified. The identification is a function of the risk factor data, the inspecting step and the circuit design data. A probability of semiconductor wafer failure is calculated.

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