System for handling substrate holders for vacuum coating

Details System for handling substrate holders for vacuum coating System for handling substrate holders for vacuum coating

1975-11-26

1977-01-11

Kaplan, Morris

Coating apparatus

With cutting, punching or tearing of work

Web or sheet work

118500, 294 655, C23C 1308

Patent

active

040021416

ABSTRACT:
Mechanism for lifting a substrate holder from its carrier platform and rotating the holder during substrate coating, comprises a main assembly including a permanent magnet and concentric stripping ring, an actuating piston for lowering the assembly so that the magnet and stripping ring overlie a magnetic part of the substrate holder, and for raising the assembly with coupled magnet and holder above the carrier, a spring belt transmission for rotating the magnet and holder, an auxiliary actuating piston separately connected to the magnet within the main assembly whereby upon lowering of the main assembly with holder to the carrier platform after substrate rotation, the holder can be stripped from the magnet by independent vertical actuation of the magnet piston relative to the overlying stripping ring.

REFERENCES:
patent: 2417762 (1947-03-01), Koller
patent: 2623774 (1952-12-01), Hubbard
patent: 3656454 (1972-04-01), Shrader
patent: 3662708 (1972-05-01), Shrader
patent: 3789336 (1974-01-01), Gordin
patent: 3924759 (1975-12-01), Madonia

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