System for generating soft X rays

Details System for generating soft X rays System for generating soft X rays

1985-02-27

1986-05-13

Anderson, Bruce C.

X-ray or gamma ray systems or devices

Electronic circuit

X-ray source power supply

31511171, 376143, 376144, 378 34, 378119, H05G 122, H01J 724, G21B 100, G21K 500

Patent

active

045891230

ABSTRACT:
A system for generating soft X rays. This system includes valve apparatus for repetitively providing bursts of a gas of brief duration and a magnetic pulse compression power supply for providing high current pulses. The system further includes a transmission line connected to the power supply for transmitting power pulses from the supply to discharge through bursts of gas. The power supply includes a plurality of series saturable inductor magnetic switches and a plurality of shunt capacitors. Thus, upon synchronized provision of a burst of gas from the valve apparatus and a power pulse from the power supply, a high current discharge generates plasma and an intense magnetic field which radially compresses the plasma, resulting in a dense, high temperature plasma which is an intense source of soft X rays.

REFERENCES:
patent: 2700114 (1955-01-01), Blythe
patent: 2898482 (1959-08-01), Busch
patent: 3171030 (1965-02-01), Foster et al.
patent: 3363102 (1968-01-01), Barbour
patent: 3388275 (1968-06-01), Bettenhausen et al.
patent: 3746860 (1973-07-01), Shatas et al.
patent: 4042827 (1977-08-01), McCorkle et al.
patent: 4042848 (1977-08-01), Lee
patent: 4181857 (1980-01-01), Miyoshi
patent: 4494043 (1985-01-01), Stallings et al.
"X-Ray Lithography Using a Pulsed Plasma Source" J. Vac. Scl. Technol., 19(4), Nov./Dec., 1981, pp. 1190-1193.

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