System for forming composite polymer dielectric film

Details System for forming composite polymer dielectric film System for forming composite polymer dielectric film

2007-12-18

2007-12-18

Zervigon, Rudy (Department: 1763)

Coating apparatus

Program, cyclic, or time control

Having prerecorded program medium

C118S696000, C118S715000, C118S719000, C118S725000, C156S345240, C156S345270, C156S345310

Reexamination Certificate

active

10816179

ABSTRACT:
A system for depositing a composite polymer dielectric film on a substrate is disclosed, wherein the composite polymer dielectric film includes a low dielectric constant polymer layer disposed between a first silane-containing layer and a second silane-containing layer. The system includes a process module having a processing chamber and a monomer delivery system configured to admit a gas-phase monomer into the processing chamber for deposition of the low dielectric constant polymer layer, a post-treatment module for annealing the composite polymer dielectric film, and a silane delivery system configured to admit a vapor flow containing a silane precursor into at least one of the process module and the post-treatment module for the formation of the first silane-containing layer and the silane-containing layer.

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