System for filling substrate chambers with liquid

Details System for filling substrate chambers with liquid System for filling substrate chambers with liquid

2005-09-13

2005-09-13

Warden, Jill (Department: 1743)

Chemical apparatus and process disinfecting, deodorizing, preser

Control element responsive to a sensed operating condition

C422S050000, C422S063000, C422S068100, C422S081000, C422S082000, C422S105000, C422S105000, C422S105000, C422S105000, C436S043000, C436S174000, C436S180000, C137S001000, C137S014000, C137S015180

Reexamination Certificate

active

06942836

ABSTRACT:
The present invention is directed to a system for filling sample chambers with liquid. The system includes a substrate defining the sample chambers and having a fill port, and a network of passageways connecting the sample chambers to the fill port. The system also includes a substrate support to retain the substrate in a fill position and a valve module on the substrate support. The valve module has a fill port seal opening to connect with the fill port of the substrate in the fill position, and a vacuum opening for connection to a source of vacuum. The system further includes a valve body having a liquid outlet port and a vacuum port, and means for operating the valve body so that the liquid outlet port and the vacuum port are alternately in fluid communication with the fill port seal opening.

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