System for fabrication of integrated tunable/switchable...

Electricity: electrical systems and devices – Housing or mounting assemblies with diverse electrical... – For electronic systems and devices

Reexamination Certificate

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C361S760000, C361S763000

Reexamination Certificate

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07835157

ABSTRACT:
An interconnect module and a method of manufacturing the same. The method of making an interconnect module on a substrate comprises forming an interconnect section on the substrate. The interconnect section comprises at least two metal interconnect layers separated by a dielectric layer. The method further comprises forming a passive device on the substrate at a location laterally adjacent to the interconnect section. The passive device comprises at least one moveable element comprising a metal layer. The method further comprises forming the metal layer and one of the at least two metal interconnect layers from substantially the same material.

REFERENCES:
patent: 5070317 (1991-12-01), Bhagat
patent: 6147856 (2000-11-01), Karidis
patent: 6909589 (2005-06-01), Huff

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