System for eliminating scattered light in autocollimator for mag

Details System for eliminating scattered light in autocollimator for mag System for eliminating scattered light in autocollimator for mag

1998-07-23

1999-07-27

Font, Frank G.

Optics: measuring and testing

By particle light scattering

356152, 356375, G01N 1502

Patent

active

059299878

ABSTRACT:
An autocollimator/point-range sensor system produces a linearly polarized light beam that is split into a point-range sensor beam and an autocollimator beam. The linearly polarized point-range sensor beam is utilized to carry out z-position measurements according to prior-art techniques. The autocollimator beam is passed through a quarter-wave plate to introduce a 90-degree phase shift and convert it to circularly polarized light. An analyzer placed in front of the autocollimator detector is positioned such that its transmission axis is offset with respect to the plane of polarization of the linearly polarized point-range sensor beam, thereby blocking any scattered light from the sensor beam while passing a component of the circularly-polarized autocollimator light to reach the detector.

REFERENCES:
patent: 5257087 (1993-10-01), Furuya
patent: 5480775 (1996-01-01), Ito et al.
patent: 5636013 (1997-06-01), Swift

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