Chemistry: electrical and wave energy – Apparatus – Electrolytic
Reexamination Certificate
2004-04-12
2008-09-23
Wilkins, Harry (Department: 1795)
Chemistry: electrical and wave energy
Apparatus
Electrolytic
C204S193000, C204S194000, C204S242000
Reexamination Certificate
active
07427337
ABSTRACT:
An apparatus for electropolishing a conductive layer on a wafer using a solution is disclosed. The apparatus comprises an electrode assembly immersed in the solution configured proximate to the conductive layer having a longitudinal dimension extending to at least a periphery of the wafer, the electrode assembly including an elongated contact electrode configured to receive a potential difference, an isolator adjacent the elongated contact electrode, and an elongated process electrode adjacent the isolator configured to receive the potential difference, a voltage supply is configured to supply the potential difference between the contact electrode and the process electrode to electropolish the conductive layer on the wafer.
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Ashjaee Jalal
Basol Bulent M.
Frey Bernard M.
Govzman Boris
Talieh Homayoun
Knobbe Martens Olson & Bear LLP
Mendez Zulmariam
Novellus Systems Inc.
Wilkins Harry
LandOfFree
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