System for dispatching semiconductors lots

Details System for dispatching semiconductors lots System for dispatching semiconductors lots

2006-01-31

2008-09-16

Picard, Leo (Department: 2125)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Product assembly or manufacturing

C700S019000, C702S182000, C707S793000, C709S241000, C710S001000

Reexamination Certificate

active

07426420

ABSTRACT:
A system for dispatching a plurality of semiconductor lots among a plurality of tools is provided. The system includes a dispatch server manager and a dispatch integrator and display device. The dispatch integrator and display device conveys a dispatch request to the manager and receives a dispatch list from the manager. The manager queries for a processing status of the plurality of semiconductor lots and displays a dispatch list in response to the processing status. The dispatch list includes an associated reason and/or code related to the processing status.

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