System for diluting ultrapure chemicals which is intended for th

Agitating – Having interrelated feed and discharge means – Recirculating from and to mixing chamber

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3661521, 137 3, G05D 1102, B01F 1502

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active

061460087

ABSTRACT:
System for diluting an ultrapure concentrated chemical including: (i) a first tank which contains the chemical in concentrated form having a predetermined purity P, (ii) a supply of ultrapure water of purity at least equal to P, (iii) a second tank for mixing the concentrated chemical with the ultrapure water to obtain a solution of diluted chemical whose purity is at least equal to P, (iv) a structure for adjusting the titre of the solution of diluted, chemical to a desired final concentration. The structure for adjusting the titre includes (a) a structure for measuring the titre of the dilute solution after mixing a predetermined quantity of ultrapure water with concentrated chemical of purity P so as to obtain a mixture with a concentration of chemical which is greater than the desired final concentration of the diluted chemical, (b) a structure for adding an additional quantity of ultrapure water to the mixture to obtain a second further diluted mixture, this additional quantity being at most equal to a theoretical quantity necessary for obtaining the desired titre, and (c) a structure for stirring the second further diluted mixture for a time such that the diluted chemical is recirculated on itself at least approximately three times so as to ensure that the diluted chemical is well homogenized and that the titre is substantially constant over the entire volume of the diluted chemical, and (d) a structure for checking the titre of the solution of diluted chemical; and (v) a third tank for storing the chemical.

REFERENCES:
patent: 4357110 (1982-11-01), Hope et al.
patent: 4823987 (1989-04-01), Switall
patent: 4974964 (1990-12-01), Yoshihara et al.
patent: 5445193 (1995-08-01), Koeninger et al.
patent: 5476320 (1995-12-01), Taguchi et al.
patent: 5522660 (1996-06-01), O'Dougherty
patent: 5800056 (1998-09-01), Suzuki et al.
Patent Abstract of Japan, vol. 18, No. 290, JP 06 061136 A, Mar. 4, 1994.

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