System for detecting metal content on a semiconductor...

Details System for detecting metal content on a semiconductor... System for detecting metal content on a semiconductor...

2005-01-04

2005-01-04

LeDynh, Bot (Department: 2862)

Electricity: measuring and testing

Magnetic

Magnetic field detection devices

C324S228000

Reexamination Certificate

active

06838874

ABSTRACT:
An apparatus for detecting the presence of metal material in a semiconductor wafer. The apparatus comprises: (i) a current-carrying coil for generating a first magnetic field, wherein the first magnetic field is capable of causing the metal material in the semiconductor wafer to generate an opposing magnetic field; and (ii) a detection circuit for detecting the opposing magnetic field generated by the metal material when the semiconductor wafer is in proximity to the current-carrying coil.

REFERENCES:
patent: 5726628 (1998-03-01), Yoo
patent: 6456079 (2002-09-01), Ott et al.
patent: 6683452 (2004-01-01), Lee et al.

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