System for detecting anomalies and/or features of a surface

Details System for detecting anomalies and/or features of a surface System for detecting anomalies and/or features of a surface

2007-10-09

2007-10-09

Nguyen, Sang H. (Department: 2886)

Optics: measuring and testing

Inspection of flaws or impurities

Surface condition

C356S237500, C356S394000

Reexamination Certificate

active

10949078

ABSTRACT:
A cylindrical mirror or lens is used to focus an input collimated beam of light onto a line on the surface to be inspected, where the line is substantially in the plane of incidence of the focused beam. An image of the beam is projected onto an array of charge-coupled devices parallel to the line for detecting anomalies and/or features of the surface, where the array is outside the plane of incidence of the focused beam.

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