System for detecting anomalies and/or features of a surface

Details System for detecting anomalies and/or features of a surface System for detecting anomalies and/or features of a surface

2011-01-11

2011-01-11

Toatley, Gregory J (Department: 2877)

Optics: measuring and testing

Inspection of flaws or impurities

Surface condition

C250S559080, C250S559310, C250S559410, C356S237600, C356S614000

Reexamination Certificate

active

07869023

ABSTRACT:
A cylindrical mirror or lens is used to focus an input collimated beam of light onto a line on the surface to be inspected, where the line is substantially in the plane of incidence of the focused beam. An image of the beam is projected onto an array of charge-coupled devices parallel to the line for detecting anomalies and/or features of the surface, where the array is outside the plane of incidence of the focused beam.

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