System for controlling drive of a wafer stage

Details System for controlling drive of a wafer stage System for controlling drive of a wafer stage

1985-09-25

1987-02-03

Shoop, Jr., William M.

Electricity: motive power systems

Positional servo systems

With particular 'error-detecting' means

318561, 318594, G05B 106

Patent

active

046410716

ABSTRACT:
A system for controlling drive of a movable member for carrying a workpiece such as a semiconductor wafer, the system including a first servo control system effective to move the workpiece carrying member at a relatively high speed and with a relatively low positional accuracy for stoppage of the workpiece carrying member, a second servo control system effective to move the workpiece carrying member at a relatively low speed and with a relatively high positional accuracy for the stoppage of the workpiece carrying member, and a system for selecting one of or a combination of the first and second servo control system in accordance with a positional accuracy required with respect to a target position of the workpiece carrying member.

REFERENCES:
patent: 4223257 (1980-09-01), Miller
patent: 4535277 (1985-08-01), Kurakake

Affiliated with

Also associated with

Rating

System for controlling drive of a wafer stage does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with System for controlling drive of a wafer stage, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and System for controlling drive of a wafer stage will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1092767