Material or article handling – Article reorienting device – Article support means rockable on fixed surface
Patent
1997-09-29
1999-10-26
Ellis, Christopher P.
Material or article handling
Article reorienting device
Article support means rockable on fixed surface
414433, 414217, 414936, 414940, B65G 2100
Patent
active
059716967
ABSTRACT:
There is provided a cassette carrying-in system, which can rotate a cassette housing therein substrates to be treated so that the substrates are changed from a vertical state to a horizontal state and which can carry the cassette in, e.g., a load-lock chamber of a vacuum processing unit. The cassette carrying-in system is provided for carrying a cassette, in which a plurality of substrates to be processed are arranged in parallel, in a processing unit for treating the substrates. The cassette carrying-in system comprises: a moving body having a first supporting portion for holding a bottom portion of the cassette so that the substrates to be processed are arranged vertically, and a second supporting portion, which is rotatable with the first supporting portion and which supports thereon a side of the cassette when the cassette is inclined, the second supporting portion supporting thereon the side serving as a bottom of the cassette when the substrates to be processed are arranged horizontally; a rotating mechanism for rotating the first and second supporting portions so that the substrates in the cassette are changed between a vertical state and a horizontal state; and a running mechanism for running the moving body so that the cassette supported on the first and second supporting portions moves between inside and outside the processing unit.
REFERENCES:
patent: 5048164 (1991-09-01), Harima
patent: 5181819 (1993-01-01), Sakata et al.
patent: 5183378 (1993-02-01), Asano et al.
patent: 5186594 (1993-02-01), Toshima et al.
patent: 5273423 (1993-12-01), Shiraiwa
patent: 5303671 (1994-04-01), Kondo et al.
patent: 5443348 (1995-08-01), Biche et al.
patent: 5468112 (1995-11-01), Ishii et al.
patent: 5507614 (1996-04-01), Leonov et al.
patent: 5664926 (1997-09-01), Sussman et al.
patent: 5664927 (1997-09-01), Takeuchi
patent: 5715929 (1998-02-01), Scheler et al.
patent: 5769588 (1998-06-01), Toshima et al.
Endo Tamio
Harima Yoshiyuki
Ellis Christopher P.
Hess Douglas
Tokyo Electron Limited
LandOfFree
System for carrying-in of cassette for substrates to be processe does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with System for carrying-in of cassette for substrates to be processe, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and System for carrying-in of cassette for substrates to be processe will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-756645