System for automatically producing different semiconductor produ

Details System for automatically producing different semiconductor produ System for automatically producing different semiconductor produ

1993-03-16

1996-02-27

Trammell, James P.

Boots, shoes, and leggings

364149, 364578, G05B 1304

Patent

active

054954177

ABSTRACT:
A system for automatically producing semiconductor products has a section for preparing a process flow containing a series of processes and process conditions for producing different semiconductor products in different quantities in a production line; a section for simulating the producing of semiconductor products according to the process flow; a section for feeding a result of the simulation back to the process flow preparation section, which optimizes the process flow according to the simulation result; and a section for producing semiconductor products according to the optimized process flow.

REFERENCES:
patent: 4646238 (1987-02-01), Carlson, Jr. et al.
patent: 4796194 (1989-01-01), Atherton
patent: 4807108 (1989-02-01), Ben-Arieh et al.
patent: 4901242 (1990-02-01), Kotan
patent: 5319564 (1994-06-01), Smayling et al.

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