Coherent light generators – Particular beam control device – Tuning
Patent
1989-11-22
1991-06-18
Gonzalez, Frank
Coherent light generators
Particular beam control device
Tuning
372 32, H01S 310
Patent
active
050254456
ABSTRACT:
A laser light beam is processed in a first optical path to produce light indications in a plurality of free spectral paths. These light indications are introduced through slits to produce signals at spaced positions at the opposite peripheries of a linear detector array. The distances between correlated pairs of energized detectors at the opposite peripheries of the array indicate the relative value of the laser wavelength in the free spectral ranges. The laser light beam is also processed in a second optical path, simultaneously with the processing of the laser light beam in the first optical path, to produce light in a single path. The second optical path is dependent upon the wavelength of the laser light beam. The light produced in the second optical path may be introduced through another slit to energize centrally disposed detectors in the array. The particular detectors energized are dependent upon the wavelength of the laser light. The detectors in the linear array may be scanned to produce signals related in time to the disposition of the detectors energized in the array. A data processing system processes these signals and produces a signal to adjust the wavelength of the laser beam to a particular value. When the laser is pulsed, the system described above may operate in real time after each pulse to adjust the laser before the next pulse to produce light at the particular wavelength.
REFERENCES:
patent: 4864578 (1989-09-01), Proffitt et al.
patent: 4896327 (1990-01-01), Ebbery
patent: 4897843 (1990-01-01), Scott
patent: 4905243 (1990-02-01), Lokai et al.
patent: 4914662 (1990-04-01), Nakatani et al.
patent: 4932030 (1990-06-01), Chung
Anderson Stuart L.
Sandstrom Richard L.
Cymer Laser Technologies
Gonzalez Frank
Hansen Galen J.
Roston Ellsworth R.
Schwartz Charles H.
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