System for and method of providing a wide-range flow controller

Details System for and method of providing a wide-range flow controller System for and method of providing a wide-range flow controller

2011-01-25

2011-01-25

Patel, Harshad (Department: 2855)

Measuring and testing

Volume or rate of flow

Proportional

C073S204210

Reexamination Certificate

active

07874208

ABSTRACT:
An improved flow measuring device, such as a mass flow meter or mass flow controller, providing a high turn-down ratio as compared to prior art devices. In accordance with various embodiments of the invention, a flow sensor includes a sensor flow path that includes one or more restrictions configured to provide the sensor flow path with a non-linear relationship between a pressure drop across the sensor flow path and the flow of fluid through the flow sensor conduit. Such a flow sensor preferably achieves a high turn-down ratio by way of a variable bypass ratio that is directly proportional to the sensor tube mass flow rate so that the turn-down ratio of the mass flow controller will be ideally proportional to the square of the turndown achievable by the flow sensor conduit fluid sensing portion alone. In some embodiments, the restriction can be employed as a part of a fluid seal having an orifice and disposed between a flow sensor portion of a flow meter and a bypass portion of the flow meter.

REFERENCES:
patent: 3521910 (1970-07-01), Callahan, Jr. et al.
patent: 3559482 (1971-02-01), Baker et al.
patent: 3938384 (1976-02-01), Blair
patent: 4332165 (1982-06-01), Kawai et al.
patent: 4335605 (1982-06-01), Boyd
patent: 4370893 (1983-02-01), Combes
patent: 4425806 (1984-01-01), Van Scoy
patent: 4461173 (1984-07-01), Olin
patent: 4517838 (1985-05-01), Wachi et al.
patent: 4519246 (1985-05-01), Hartemink
patent: 4524616 (1985-06-01), Drexel et al.
patent: 4682496 (1987-07-01), Miura et al.
patent: 4685331 (1987-08-01), Renken et al.
patent: 4800754 (1989-01-01), Korpi
patent: 4843881 (1989-07-01), Hubbard
patent: 4876887 (1989-10-01), Mickler
patent: 4984460 (1991-01-01), Isoda
patent: 4987549 (1991-01-01), Gee
patent: 5012432 (1991-04-01), Stetter et al.
patent: 5036701 (1991-08-01), van der Graaf
patent: 5285673 (1994-02-01), Drexel et al.
patent: 5339687 (1994-08-01), Gimson et al.
patent: 5347861 (1994-09-01), Satoh
patent: 5359878 (1994-11-01), Mudd
patent: 5373737 (1994-12-01), Hwang
patent: 5379630 (1995-01-01), Lacey
patent: 5460039 (1995-10-01), Cutler
patent: 5461913 (1995-10-01), Hinkle et al.
patent: 5509306 (1996-04-01), Yamamoto et al.
patent: 5696321 (1997-12-01), Igarashi et al.
patent: 5753815 (1998-05-01), Murata
patent: 5758910 (1998-06-01), Barber et al.
patent: 5763774 (1998-06-01), Ha et al.
patent: 5803507 (1998-09-01), Vu
patent: 5868159 (1999-02-01), Loan et al.
patent: 6038921 (2000-03-01), McMillan et al.
patent: 6094982 (2000-08-01), Suzuki
patent: 6112576 (2000-09-01), Tsopelas et al.
patent: 6357760 (2002-03-01), Doyle
patent: 6370950 (2002-04-01), Lammerink
patent: 6450024 (2002-09-01), McCulloch et al.
patent: 6564629 (2003-05-01), Stark
patent: 6568261 (2003-05-01), Saikalis et al.
patent: 6575027 (2003-06-01), Larsen et al.
patent: 6681625 (2004-01-01), Berkcan et al.
patent: 6725166 (2004-04-01), Luchner
patent: 6763710 (2004-07-01), Mayer et al.
patent: 6763711 (2004-07-01), Nair et al.
patent: 6805003 (2004-10-01), Ueki et al.
patent: 6829930 (2004-12-01), Ismail et al.
patent: 6840102 (2005-01-01), Kouno
patent: 6843110 (2005-01-01), Deane et al.
patent: 6843122 (2005-01-01), Kim et al.
patent: 6843123 (2005-01-01), Tokuhisa et al.
patent: 6845984 (2005-01-01), Doyle
patent: 6889544 (2005-05-01), Tanimoto et al.
patent: 6928865 (2005-08-01), Ito et al.
patent: 6968283 (2005-11-01), Matsumura et al.
patent: 6988400 (2006-01-01), Lotters
patent: 7000465 (2006-02-01), L'Bassi et al.
patent: 7028544 (2006-04-01), Besseling et al.
patent: 7036367 (2006-05-01), Golan
patent: 7062965 (2006-06-01), Immel
patent: 7066022 (2006-06-01), Nikolaus
patent: 7107835 (2006-09-01), Korniyenko et al.
patent: 7124647 (2006-10-01), Tison et al.
patent: 7155970 (2007-01-01), Ariyoshi et al.
patent: 7363182 (2008-04-01), Tison et al.
patent: 7377152 (2008-05-01), Brekelmans et al.
patent: 7431045 (2008-10-01), Mudd et al.
patent: 2002/0056318 (2002-05-01), Kobayashi et al.
patent: 2004/0083807 (2004-05-01), Mudd et al.
Priestman, Geoffrey H. and Robert F. Boucher, ‘The Biased Laminar By-Pass Fluidic Flowmeter,’ Journal of Fluids Engineering, Nov. 2005, pp. 1199-1204, vol. 127.

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