System for a pellicle frame with heightened bonding surfaces

Details System for a pellicle frame with heightened bonding surfaces System for a pellicle frame with heightened bonding surfaces

2007-02-06

2008-03-04

Nguyen, Henry Hung (Department: 2851)

Photocopying

Projection printing and copying cameras

Detailed holder for original

C355S072000, C355S077000

Reexamination Certificate

active

07339653

ABSTRACT:
A method and apparatus for maintaining an optical gap between optical structures in a photolithography system is described. A frame defines first and second opposing surfaces. The first opposing surface defines a first opening and the second opposing surface defines a second opening. A plurality of spacing members are spaced apart on the first opposing surface around the first opening. The spacing members have substantially co-planar surfaces configured to mate with a surface of a first optical structure. A bonding agent seals a space around the first opening between the first opposing surface and the first optical structure. The frame thereby encloses the optical gap between the first optical structure and a second optical structure.

REFERENCES:
patent: 4719705 (1988-01-01), Laganza et al.
patent: 4986007 (1991-01-01), Laganza et al.
patent: 5344677 (1994-09-01), Hong
patent: 5485495 (1996-01-01), Miyachi et al.
patent: 5487771 (1996-01-01), Zeller
patent: 5601955 (1997-02-01), Fujita et al.
patent: 5691088 (1997-11-01), Kubota et al.
patent: 5727685 (1998-03-01), Laganza et al.
patent: 5814272 (1998-09-01), Zeller et al.
patent: 5814381 (1998-09-01), Kuo
patent: 6101237 (2000-08-01), Miyachi et al.
patent: 6192100 (2001-02-01), Acosta et al.
patent: 6216873 (2001-04-01), Fosnight et al.
patent: 6436586 (2002-08-01), Matsuoka et al.
patent: 6507390 (2003-01-01), Ivaldi
patent: 6788392 (2004-09-01), Nakano
patent: 6822731 (2004-11-01), Laganza et al.
patent: 6825916 (2004-11-01), Wiseman et al.
patent: 6847434 (2005-01-01), Laganza et al.
patent: 6869733 (2005-03-01), Su
patent: 6906783 (2005-06-01), del Puerto et al.
patent: 6977126 (2005-12-01), Shirasaki
patent: 7052809 (2006-05-01), Vroman et al.
patent: 7173689 (2007-02-01), Laganza et al.
patent: 2001/0026355 (2001-10-01), Aoki et al.
patent: 2002/0085183 (2002-07-01), Wu et al.
patent: 2002/0179522 (2002-12-01), Phillips et al.
patent: 2003/0123042 (2003-07-01), Laganza et al.
patent: 2004/0109153 (2004-06-01), Vroman et al.
patent: 2005/0090558 (2005-04-01), Chiba et al.
patent: 2005/0151955 (2005-07-01), Laganza et al.
patent: 0 696 760 (1996-02-01), None
patent: 61-85850 (1986-06-01), None
patent: 4-93945 (1992-03-01), None
patent: 2002-158153 (2002-05-01), None
patent: 2003-307832 (2003-10-01), None
patent: WO 92/21006 (1992-11-01), None
patent: WO 01/59522 (2001-08-01), None
Thomas Register, Companies Found, Search Path: porous; Metals; Porous: 38 companies found (visited Dec. 27, 1999) <http://www5.thomasregister.com>, 2 pages.
Filter Technology: Functionally porosity for high-performance applications (visited Dec. 27, 1999) <http://www.gknsintermetals.com/filter technology.html>, 2 pages.
Patent Abstracts of Japan, vol. 011, JP 09 197652A; published Jul. 31, 1997.
Patent Abstracts of Japan, vol. 015, No. 410(P-1264), JP 03 166545 A, published Jul. 18, 1991.
Patent Abstracts of Japan, vol. 016, No. 521(E-1285), JP 04 196117 A, published Jul. 15, 1992.
Patent Abstracts of Japan, vol. 017, No. 060(P-1482), JP 04 269752 A, published Sep. 25, 1992.
Patent Abstracts of Japan, vol. 018, No. 096(P-1694), JP 05 297572 A, published Nov. 12, 1993.
Patent Abstracts of Japan, JP 04 196117, published Jul. 15, 1992.
Copy of International Search Report issued Mar. 19, 2001 for PCT/US00/30432, 7 pages.
European Search Report from European Patent Appl. No. 06014070.4-2222, dated Oct. 20, 2006, 3 pages.
European Search Report from European Patent Appl. No. 03027785.9, 5 pages, dated Jan. 11, 2006.
Vroman, Christopher, U.S. Appl. No. 60/415,688, filed Oct. 2,2002, 14 pages.

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