System, apparatus, and method for determining...

Details System, apparatus, and method for determining... System, apparatus, and method for determining...

2006-01-05

2008-11-04

Turner, Samuel A (Department: 2877)

Optics: measuring and testing

By light interference

For dimensional measurement

C356S479000, C356S503000

Reexamination Certificate

active

07446881

ABSTRACT:
A measuring apparatus including a light source that emits light with a wavelength that allows the light to be transmitted through and reflected at each measurement target, a splitter that splits the light from the light source into measurement light and reference light, a reference mirror at which the reference light from the splitter is reflected, a mechanism for driving the reference mirror to adjust the optical path length of the reference light reflected from the reference mirror and a mechanism for measuring the interference of the reference light reflected from the reference mirror as the reference light from the splitter is radiated toward the reference mirror and measurement beams reflected from a plurality of measurement targets as the measurement light from the splitter is radiated toward the measurement targets so as to be transmitted through the measurement targets.

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J.A. McCaulley, V.M. Donelly et al. (J.A. McCaulley, V.M. Donelly, M. Vernon and I. Taha), “Temperature dependence of the near-infrared refractive index of silicon, gallium arsenide and indium phosphide”, The American Physical Society, Phy. Rev. B49,7408, 1994.

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